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Atomic Layer Deposition for Semiconductors

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 | #2976795 in Books |  2013-10-19 | Original language:English | PDF # 1 |  9.21 x.69 x6.14l,1.20 | File type: PDF | 263 pages

||From the Back Cover||Atomic Layer Deposition (ALD) was originally designed for depositing uniform passivation layers over a very large area  for display devices in the late 1970s. Only recently, in the 21st century, has the this technique become popular for

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.



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